Nikon Unveils NEXIV: A Revolutionary Video Measurement Tool for Semiconductors
Nikon Corporation has introduced the NEXIV system, a cutting-edge video measurement tool designed for the semiconductor industry. This innovative system, developed by Nikon, offers a range of precise measurement capabilities, from inspecting geometric parameters to controlling Critical Dimension (CD) measurements across entire wafers.
The NEXIV system can accurately measure various aspects of semiconductor chips. It can determine the height, diameter, and x/y position of bumps on the chip. Additionally, it can measure overlay marks of different shapes and heights with precision. Nikon's advanced optics and high-precision measurement stage ensure these measurements are accurate down to micrometres.
The NEXIV system also excels in measuring probe card tips. It can determine the tip's position, height, and diameter using its confocal capabilities. In the realm of semiconductor production, the NEXIV system is used to control geometric parameters across wafers, ensuring consistency and quality.
The NEXIV software is versatile. It can calculate necessary sizes and forms for CD structures, going beyond simple point-to-point measurements. The system is ideal for controlling CD measurements of various structure types and sizes across the whole wafer. It provides high-resolution images, precise dimensional measurement, and automated quality control.
Moreover, the NEXIV system can inspect wafer IDs. It can measure character height, width, spacing, and position relative to the wafer centre. Nikon also offers automated wafer-handling solutions, such as the NWL 200 wafer loader, for use with the NEXIV system, streamlining the inspection process.
The NEXIV system, developed by Nikon, is a comprehensive solution for semiconductor inspection. It offers precise measurements, versatile software, and automated quality control, making it an invaluable tool in semiconductor production.
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